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Cluster tools are typically very flexible and easy expandable multi chamber systems containing a central linear or radial distribution system. Bestec provides linear or radial distribution chamber systems or even complete cluster tools.
Bestec provides customized deposition systems with different possible deposition techniques (e.g. e-beam evaporation or thermal evaporation), deposition geometries, chamber base pressure and sample manipulation.
Bestec provides customized sputter systems with different possible sputter geometries, chamber base pressure and sample manipulation. The systems are applicable for a wide range of applications.
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