P463 – Secondary Source Slits I22 DLS
Application
Secondary source slits for hard X-ray synchrotron radiation
Year of delivery
2017
Installation site
Beamline I22 at Diamond Light Source, Didcot, United Kingdom
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
-
Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- Tungsten slit blades.
- Motorized and encoded slit unit vertical translation.
- Motorized and encoded slit unit translation transversal to beam axis.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.35 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edge length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Translation transversal
to beam axis
Range
± 10 mm
Stability (>15h)
0.025 µm
Resolution (design value)
0.025 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertical translation
Range
± 10 mm
Long-term stability (15h)
0.06 µm
Resolution (design value)
0.40 µm /step
(full step at actuator)
0.08 µm /step
(full step at wedge leveler)
0.005 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Horizontally defining slit (HDS)
Slit blades
Material
Tungsten
Straightness
< 0.20 µm over 10 mm (1σ)
Parallelism
-0.003 µm /mm
(10 µm slit opening)
0.03 µm /mm
(50 µm slit opening)
0.03 µm /mm
(100 µm slit opening)
Slit opening
Range
5 µm to 8.2 mm
Repeatability
± 0.07 µm
(up to 235 µm slit opening)
Long-term stability (> 3h)
0.04 µm
Min. incremental
movement
≤ 0.2 µm at <200 µm
Resolution (design value)
0.0016 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.12 µm
Vertically defining slit (VDS)
Slit blades
Material
Tungsten
Straightness
< 0.25 µm over 10 mm (1σ)
Parallelism
-0.09 µm /mm
(10 µm slit opening)
-0.01 µm /mm
(50 µm slit opening)
-0.01 µm /mm
(100 µm slit opening)
Slit opening
Range
5 µm to 8.2 mm
Repeatability
± 0.03 µm
(up to 320 µm slit opening)
Long-term stability (> 4h)
0.02 µm
Min. incremental
movement
≤ 0.2 µm at <200 µm
Resolution (design value)
0.0016 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Resolution (measured value)
0.17 µm
Performance Test Results
Slit width calibration (HDS)
Slit opening repeatability (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit opening stability (HDS)
Slit opening positioning resolution (HDS)
Slit opening positioning resolution (HDS)
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit blade parallelism (VDS)
Slit blade parallelism (VDS)
Slit blade parallelism (VDS)
Slit opening stability (VDS)
Slit opening positioning resolution (VDS)
Slit opening positioning resolution (VDS)
Residual gas analysis
